Analytical techniques used at various points in making microchips are described. They include: Fourier transform infrared spectrometry (silicon purity); optical emission spectroscopy (quantitative thin-film composition); X-ray photoelectron spectroscopy (chemical changes in thin films); wet chemistry, instrumental analysis (process chemicals);…

Traces the development of instruments used in spectrophotometry. Discusses how spectrophotometric measurements are made. Describes the color comparator, the filter photometer, and the spectrophotometer. Outlines the evolution of optical systems, including light sources, the monochromator, the photodetector, double-beam optics, and split-beam…