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Peer reviewedLowry, Robert K. – Analytical Chemistry, 1986
Analytical techniques used at various points in making microchips are described. They include: Fourier transform infrared spectrometry (silicon purity); optical emission spectroscopy (quantitative thin-film composition); X-ray photoelectron spectroscopy (chemical changes in thin films); wet chemistry, instrumental analysis (process chemicals);…
Descriptors: Chemical Analysis, Chemistry, College Science, Higher Education
