Analytical techniques used at various points in making microchips are described. They include: Fourier transform infrared spectrometry (silicon purity); optical emission spectroscopy (quantitative thin-film composition); X-ray photoelectron spectroscopy (chemical changes in thin films); wet chemistry, instrumental analysis (process chemicals);…

This literature review on chemometrics (covering December 1981 to December 1983) is organized under these headings: personal supermicrocomputers; education and books; statistics; modeling and parameter estimation; resolution; calibration; signal processing; image analysis; factor analysis; pattern recognition; optimization; artificial…

Presents a series of four applications of data acquisition, system control, and data analysis using personal computers. Covers topics of pilot plant information and control, automation of drug safety evaluation, analysis and characterization of petroleum resources, and high-speed analog-digital conversion connections. Part three of a series on…