Analytical techniques used at various points in making microchips are described. They include: Fourier transform infrared spectrometry (silicon purity); optical emission spectroscopy (quantitative thin-film composition); X-ray photoelectron spectroscopy (chemical changes in thin films); wet chemistry, instrumental analysis (process chemicals);…

This literature review on chemometrics (covering December 1981 to December 1983) is organized under these headings: personal supermicrocomputers; education and books; statistics; modeling and parameter estimation; resolution; calibration; signal processing; image analysis; factor analysis; pattern recognition; optimization; artificial…